IEC 63041-3:2026 is applicable to piezoelectric physical sensors mainly used in the field
of process control, wireless monitoring, dynamics, thermodynamics, vacuum engineering, and
environmental sciences. This document provides users with technical guidelines as well as
basic knowledge of common physical sensors.
Piezoelectric sensors covered herein are those applied to the detection and measurement of
physical quantities such as force, pressure, torque, viscosity, temperature, film thickness,
acceleration, vibration, and tilt angle.

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