BS ISO 21859:2019

BS ISO 21859:2019 Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment
standard by British Standard / International Organization for Standardization, 06/19/2019

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Full Description

This document specifies a test method for plasma resistance of ceramic components in semiconductor manufacturing equipment. It is applicable to ceramic components of plasma-resistant components in dry etching chambers used in semiconductor manufacturing.

Cross References:
ISO 4287
ISO 18452
ISO 3274

All current amendments available at time of purchase are included with the purchase of this document.

Product Details

Published: 06/19/2019 ISBN(s): 9780580962011 Number of Pages: 10 File Size: 1 file , 490 KB Product Code(s): 30350531, 30350531, 30350531 Note: This product is unavailable in United Kingdom