AS/NZS 14644.3:2009
AS/NZS 14644.3:2009
Cleanrooms and associated controlled environments Test methods (ISO 14644-3:2005, MOD)
Standards Australia
Cleanrooms and associated controlled environments Test methods (ISO 14644-3:2005, MOD)
Standards Australia
Adopts ISO 14644-3:2005 with national modifications to provide test methods for unidirectional and non-unidirectional flow cleanrooms.
Document Type | Standard |
Status | Current |
Publisher | Standards Australia |
Committee | ME-060 |
Supersedes |
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