IEC 62047-32 Ed. 1.0 b:2019
IEC 62047-32 Ed. 1.0 b:2019 Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators
standard by International Electrotechnical Commission, 01/24/2019
Full Description
IEC 62047-32:2019 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.Cart
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SAE AMS2526D
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