IEC 62047-33 Ed. 1.0 en:2019
IEC 62047-33 Ed. 1.0 en:2019
Semiconductor devices - Micro-electromechanical devices - Part 33: MEMS piezoresistive pressure-sensitive devicestandard by International Electrotechnical Commission, 04/05/2019
standard by International Electrotechnical Commission, 04/05/2019